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Single side heating RTP system

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[Basic Infomation]
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[ULTECH]

  • South Korea South Korea
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Product Detail Information

 

[ Model ] 

-. UTR-S100N

[ Specification ] 

-. Substrate size & load capacity : 4inch wafer - 1 wafer/batch
-. Temperature range : RT~1,000 ℃
-. Substrate holder : Quartz (pin)
-. Rotary pump
-. Manual angle valve
-. MFC: O2(1slm), N2(1slm)
-. Manual control (switch panel)

[ Application ]

-. Thin Gate Oxidation(Low Pressure, Nano device)
-. Rapid Annealing (Atmospheric or Low Pressure)

 

Attached File