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Wet bench system

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[Basic Infomation]
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Product Detail Information

 

[ Model ] 

-. AquaChem-SO-001

[ Specification ] 

-. Substrate size & load capacity
         : 8inch wafer - 1 cassette/batch
-. Chemical bath(SUS316) 3ea
-. QDR bath(SUS316) 1ea
-. Rinse bath(PVDF) 1ea
-. Heater(1.5kW) 3ea
-. Ultra sonic(44kHz,600W) 2ea
-. SUS304 out plate 
-. Manual control (switch panel & PLC)

[ Application ]

-. Remove material from areas indentified by the lithography process
-. Create structures for functional use
-. Remove oxide laters below features to allow for motion
-. V-Groove, U-Groove, Cavity formation

 

Attached File