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Wet bench system with DI generator

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[Basic Infomation]
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[ULTECH]

  • South Korea South Korea
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Product Detail Information

[ Model ]

 

-. AquaChem-DG-004

 

[ Specification ]

 

-. Substrate size & load capacity
      : 200mm*200mm glass - 1 cassette/batch
-. Chemical bath(SUS316) 2ea
-. QDR bath(PVDF) 1ea
-. Sink bath(PP) 1ea
-. Ultra sonic(40kHz,600W) 1ea
-. DI generator
     DI Resistivity : 17 ~ 18.2 mega ohm/㎝
     DI Productivity : 500LPH
     RO Tank : 650L
-. PVC out plate .
-. Manual control (switch panel & PLC) 

 

Attached File