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PLD System

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[Basic Infomation]
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[ULTECH]

  • South Korea South Korea
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Product Detail Information



 

[ Model ] 

-. PLD-S-005

[ Specification ] 

-. Substrate size & load capacity
          : 20mm*20mm wafer - 1 wafer/batch
-. Target size : 1inch
-. Carrousel (4 target holder, Target rotation & revolution)
-. Heater & carrousel moving (Left / Right)
-. TMP + Rotary pump
-. Manual gate valve + Baratron gauge
-. MFC: O2(100sccm), N2(100sccm)
-. Manual control (switch panel)

 

 

Attached File