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PLD System

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[Basic Infomation]
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[ULTECH]

  • South Korea South Korea
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Product Detail Information

[ Model ]

 

-. PLD-H-002

 

[ Specification ]

 

-. Substrate size & load capacity
            : 20mm*20mm wafer - 1 wafer/batch
-. Target size : 1inch
-. Carrousel (4 target holder, Target rotation & revolution)
-. TMP + Rotary pump
-. Throttle valve + APC controller +  Baratron gauge
-. MFC: O2(50sccm), Ar(50sccm)
-. Manual control (switch panel)

 

Attached File