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PLD System

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[Basic Infomation]
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[ULTECH]

  • South Korea South Korea
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Product Detail Information

[ Model ]

 

-. PLD-F-001

 

[ Specification ]

 

-.Substrate size & load capacity
                    : 20mm*20mm wafer - 1 wafer/batch
-. Target size : 1inch
-. Carrousel (1 target holder, Target rotation)
-. Furnace type 1-zone heater, max.1100℃
-. Rotary pump
-. Manual angle valve
-. MFC: O2(100sccm)
-. Manual control (switch panel) 

 

Attached File