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Spin coating system

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[Basic Infomation]
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[ULTECH]

  • South Korea South Korea
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Product Detail Information

 [ Model ]

 

-. UTS-100

 

[ Specification ]

 

-. Wafer size & throughput :  4" single wafer / run
-. RPM : Max. 8,000
-. Vacuum pump : Diaphragm pump(35 l/min)
-. System interlock : Process run interlock ( Vacuum, Door)
-. Program : 10 programs ( 10 recipe at each program )
-. PLC & Touch control

 

[ Application ]

 

-. Photoresist(PR) coating for defining patterns in microcircuit fabrication
-. Dielectric/insulating layers coating for microcircuit fabrication (polymers, SOG, Silk, etc.)
-. Magnetic disk coating (magnetic particle suspensions, head lubri) 

Attached File