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ROLL CVD system

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[Basic Infomation]
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[ULTECH]

  • South Korea South Korea
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Product Detail Information

[ Model ]

 

-. SPACE-R

 

[ Specification ]

 

-.Substrate size
         : 250mm width flexible film - 1 roll/batch
-. Source(gas) injection : Nozzle type
-. Chamber inside heating, Sample temp.100℃
-. Dry pump
-. Manual Throttle valve
-. PLC & Touch control

 

[ Application ]

 

-. Metal deposition : Ru, TiN, WN, AlN,
-. Poly silicon deposition
-. Silicon nitride deposition
-. Metal oxide deposition: Al2O3, HfO2, ZnO, TiO2, Ta2O5, CIGS 

 

Attached File